文档介绍：第卷第期
47 6 真空 VACUUM Vol. 47,
2010 年 11 月 Nov. 2010
以低温泵为主泵的真空检漏系统研究
孟冬辉,闫荣鑫,孙立臣,刘恩均,张海峰
(北京卫星环境工程研究所,北京 100094)
摘要:由于分子泵对氦气有较大抽速,因此在真空检漏系统中通常用分子泵作为主泵,但当检漏容器
很大时需要大量分子泵。低温泵具有清洁无油、抽速大的优点,如果在检漏系统中能够采用低温泵作为主
泵,可以大大减少真空泵数量。本文对以低温泵为主泵的真空检漏系统进行了实验研究,并对实验现象进
行了分析。研究结果表明,低温泵可以有效提高检漏系统的工作真空度,对检漏系统的有效灵敏度影响很
小,但以低温泵为主泵的检漏系统的反应时间比以分子泵为主泵的检漏系统反应时间长。
关键词:检漏;低温泵;灵敏度;反应时间
中图分类号:TB774 文献标识码:B 文章编号:1002-0322(2010)06-0033-04
Study on the leak detection system with cryopump as main pump
MENG Dong-hui, YAN Rong-xin, SUN Li-chen, LIU En-jun, ZHANG Hai-feng
(Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China)
Abstract: Usually a molecular pump is used as the main pump for the vacuum leak detection system because of its high
helium pumping speed. However, the pumping speed of molecular pump is not enough for the leak detection of a large -size
vacuum chamber. The cryopump that is clean and oil -free with high pumping -speed was therefore considered to use as the
main pump instead of the molecular pump so as to decrease greatly the required number of vacuum pumps. For this reason,
the cryopump was investigated experimentally as the main pump for the vacuum leak detection system, with the results
discussed. It was revealed that the cryopump can decrease the vacuum pressure of the system efficiently, but it has no obvious
influence on t