文档介绍：该【《微机电系统》 (2) 】是由【相惜】上传分享，文档一共【28】页，该文档可以免费在线阅读，需要了解更多关于【《微机电系统》 (2) 】的内容，可以使用淘豆网的站内搜索功能，选择自己适合的文档，以下文字是截取该文章内的部分文字，如需要获得完整电子版，请下载此文档到您的设备，方便您编辑和打印。CHAPTERONE:IntroductionofMEMSDefinitionandfundamentalconceptofMEMSMEMShistoryMEMSpresentMEMSprospectApplicationsofMEMSMEMSadvantage编辑课件Definition:MEMSistheintegrationofelectricalelements,mechanicalelements,sensor,,controlandactuateonthemicroscale,,thermal,biological,chemical,optical,,positioning,regulating,pumping,andfiltering,,Firstelectrostaticmotors;In1958,merciallyavailable;December26,1959,AtCaliforniaInstituteofTechnology,RichardFeynmangavearemarkablyinsightfullecture,“Thereisplentyofroomatthebottom〞.?Hetriedtospurinnovativeminiaturefabricationtechniquesformicromechannics,buthefailedtogenerateafundamentallynewfabricationtechnique;In1967,Inventionofsurfacemicromachining;编辑课件In1969,Westinghousecreatesthe“ResonantGateFET〞basedonnewmicroelectronicsfabricationtechniques;In1970s,Bulk-etchedsiliconwafersusedaspressuresensors;In1970,elerometerdemonstrated;In1977,Firstcapacitivepressuresensor;In1980,"SiliconTorsionalScanningMirror";In1982,KurtPetersenpublished“siliconasStructuralMaterial〞,referenceformaterialpropertiesandetchingdataforsilicon;In1984,FirstpolysiliconMEMSdevice;编辑课件In1980s,earlyexperimentsinsurface-micromachinedpolysilicon,bdriveactuators—micropositioningdiscdriveheads;In1989,bdrive;Inlate1980s,micromachiningleveragesmicroelectronicsindustry,widespreadexperimentationanddocumentationincreasedpublicinterest;Earlytransductionandactuationmethodsproducesimpleactuators;Micromachiningmethodsaimedtowardimprovingsensors,thermalandelectricalisolationbetweenlayerswithsuspendedstructures;Inearly1990s,Governmentagenciesstartlarge编辑课件MEMSsupportprograms,AFOSRsupportbasicresearchinmaterialsandMEMSresearch,Cin1993,mercialfoundriesforCMOSandMEMS;Inourcountry,“micron/nanometermanufacturetechnologynationalkeylaboratory〞wasfoundedin1996;In1992,ChrisPister(UCLA)createsfirstmicromachinedhinge,it’sfeaturesopenpossibilitiesforpseudo-3Dstructuresandassembly;In1992,MCNCstartstheMultiUserMEMSProcess(MUMPS);编辑课件In1993,elerometersold(AnalogDevices,ADXL50)In1994,chingispatented;In1995,Bio-esofage;In1998,ThepremiereofStarWarsshownonTI’sDigitalMirrorDevice;Inlater1990s,actuationandfabricationmethods(ching,lasermachining,fluidics,tunneling,deepUV),ebigbusiness;,suchasUnitedStates,Japan,,theyhavemadeagreatprogressinMEMSindustry,TheirgoalofMEMSprogramistodeveloptheIntegratedMicrosystems,inotherwords,theywilldevelopthetechnologytomergesensing,actuating,putinginordertorealizenewsystemsthatbringenhancedlevelsofperception,编辑课件control,andperformancetoweaponssystemsandbattlefieldenvironments,andtheyarereadytomergeinformationprocessingwithsensingandactuationtorealizenewsystemsandstrategiestobringco-locatedperceptionandcontroltothephysical,biological,’’development,ourcountryhasacquiredconsiderablefoundationtechnicalstorageinmanyfields,suchasmicrosensor,microactuator,microrobot,biosensorandbiochip,,suchasTsinghuaUniversity,PekingUniversity,InstituteofElectronicsCAS,ShanghaiJiaoTongUniversity,FudanUniversity,SoutheastUniversity,ZhejiangUniversity,UniversityofScience&TechnologyofChina,theForty-ninthResearchInstituteofMinistryofInformationIndustry,DalianUniversityofTechnology,ShenyangInstituteofInstrumentationTechnology,ChongqingUniversity,Xi’anJiaoTongUniversity,,编辑课件