文档介绍：第十三届国际热喷涂研讨会论文(ITSS’2010)
第十四届全国热喷涂年会论文(CNTSC’2010)
超低压等离子喷涂与沉积技术的发展动态
高阳(大连海事大学,热喷涂研究中心,大连 116026)①
摘要:超低压等离子喷涂沉积技术是近几年来正在发展的一项崭新技术。该技术特点是在原低压等离子喷涂基
础上(通常喷涂工作压力为 5000-8000Pa),采用大流量真空泵,使容器内动态工作压力达到 100 Pa 以下,配置 150kw
大功率等离子喷枪,使从喷枪喷出的高温粉体在加热过程中达到一定比率的气化。该技术结合了传统等离子喷涂或
者低压等离子喷涂以凝固为主形成喷涂涂层和物理气相沉积以气/固方式形成沉积薄膜的特征。利用该技术可以制备
不同与传统等离子喷涂和物理气相沉积能够获得的涂层组织结构,为材料表面改性提供了新的技术途径。本文将介
绍这一技术的特点、发展动态和最近大连海事大学自行研制的超低压等离子喷涂与沉积设备。
关键词:等离子喷涂、低压等离子喷涂、物理气相沉积、涂层
中图分类号: 文献标识码:A 文章编号:
Development Tendencies of the Very Low Pressure Plasma
Spraying and Deposition Technology
GAO Yang
(Dalian Maritime University, Center of Thermal Spray, Dalian 116026)
Abstract Very low pressure plasma spraying and deposition (VLPPSD) is a new technology which was developed on the
basis of conventional low pressure plasma spray (usually camber pressure from 5000 to 8000Pa) to make the very low
camber pressure below 100 Pa by using the lager capability pumps and plus a high powers plasma torch higher than 150 kW.
The powder particles were heated to liquid and even evaporation in such high temperature and low pressure plasma jets. This
technology bined with the conventional low pressure plasma spray formed coatings through the solidification and
PVD formed coatings by the evaporation deposition, which can prepared a especial structural coatings different from plasma