文档介绍：上海交通大学
硕士学位论文
浮法玻璃纳米薄膜镀制技术及性能研究
姓名:陈海嵘
申请学位级别:硕士
专业:电子与通信工程
指导教师:张亚非
20090501
浮法玻璃纳米薄膜镀制技术及性能研究
摘要
随着全球能源危机和环境问题的加剧,节能环保已成为人们最为关
切的话题,具有节能、环保和美观作用的纳米镀膜玻璃在建筑、交通等
领域具有巨大的应用潜力,引起了广泛的关注。
本文对浮法玻璃纳米薄膜沉积技术及性能进行了研究。着重探讨磁
控溅射和化学气相沉积两大主流镀膜工艺及技术优势;对于磁控溅射工
艺技术,探讨了结合交流中频技术、脉冲技术和双靶技术以及气体放电
控制技术解决反应溅射中出现的“阳极消失”、“靶材中毒”和“迟滞效
应”的问题。
针对研发的三种纳米薄膜玻璃,利用行之有效的方法经过筛选设计
出遮阳系数为 、传热系数为 W/m2•K,隔热性能优越的轨道交通
车辆用纳米薄膜玻璃。利用复合电介质层-增透膜的创新设计,结合创新
的工艺控制技术,攻克了多层膜叠加导致的颜色均匀性差的难点,得到
光谱选择性极好的双银低辐射膜玻璃;探究了可钢化银基纳米薄膜玻璃
的膜层特性,发现NiCrOx保护层经高温后氧化程度提高,材料变得更加
透明,导致了可见光透射比增加,并且银层结构更加致密,表面更加光
滑,辐射率降低了 10%左右。
基于光学、热学及电学性能的研究,利用对比的方法,对浮法玻璃
锡液面对镀膜颜色均匀性的影响进行了分析和研究,发现 Sn 基镀膜玻
璃产生的色差小,由于渗锡导致的钢化玻璃虹彩会在镀膜后得到放大;
首次将显色性能引入建筑镀膜玻璃的研究,经过大量的测试比对,总结
得到的规律可以作为建筑幕墙设计的重要参考数据。
关键词:浮法玻璃,纳米薄膜,磁控溅射,化学气相沉积,显色性能
RESEARCH ON NANO-FILMS COATING
TECHNOLOGY IN FLOAT GLASS AND
PROPERTIES
ABSTRACT
Along with aggravation of energy crisis and environment, energy
conversation and environmental protection are deeply concerned topic. As
the advent of coated technology, the Nano-Films glass which has energy
conversation and environmental protection and beauty had been widely
applied to many fields, for example buildings, vehicles, etc.
This paper has mostly studied Nano-Films deposition technology in
float glass and correlated properties. The developments of ic
sputtering and CVD technology have been discussed, as well as their
ascendency. In reactive sputtering, it settles the problem of ‘anode
disappearance’, ‘targets poisoning’ and ‘slow-moving affect’ by the
technology of AC-MF, PMS, Twin-targets and Gas Discharge Control.
SYP’s three new Nano-Films glass products. The shading glazing for
motor vehicle was developed by filtering all kinds of schemes. The ideal
glazing was found out and fit the requirements of motor vehicle. Depended
on innovative design and process control, the double silver Low-E glass
es a good spectrum selectivity an