DI Water V2.ppt

文档介绍：DI Water
Technical knowledge
Sharing Class for SAET FE
超純水
专业技術分享會
(6th Sep, 2005 – Facility System Engineering Section)
Prepared by: Anthony Chan
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Content 目錄
Why do we need High Purity Water for cleaning and rinsing?
为什么要用超纯水作清洗和冲洗?
2. What is DI water?
什么是DI 水?
3. Water General Standard.
水的一般标准。
4. Learn more about water.
更多了解水。
5. DI water system.
DI 水系统。
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Content 目錄
6. More about RO.
更多了解RO。
More about CDI/EDI.
更多了解CDI/EDI。
8. More about UV Lamp.
更多了解紫外光灯。
9. Piping for DI water.
DI 水管道系统。
/ RO System for A6
為A6設計的DI/RO純水系统
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Why do we need High Purity Water for cleaning and rinsing?为什么要用超纯水作清洗和冲洗?
In its pure state, water is one of the most aggressive solvents ( aqueous solution ) known .
在它的纯净状态下, 水是现今所知性能极好的溶剂( 水溶剂) 。
Water, which is called the “universal solvent”, will dissolve virtually everything exposed to it to a certain degree.
水被称为“万能溶剂”, 事实上任何物质放入水中,都可以溶解到某一特定的程度。
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DI water is short form of “Deionized water” DI 水是“去除离子的水”的简称
Deionization is an ion exchange processes. It uses certain types of synthetic resins in the proper state and arrangements to remove most or all of the total dissolved solids (TDS), in the form of ions, from water. Water with ions taken out by ion exchange is deionized water, or ion free water.
去除离子是运用一个离子交换过程, 它使用某种类型的合成树脂在特定的状态和安排下,以离子形态去除水中大部分或全部可溶解固体。而在离子交换过程被拿走离子的水就是去除离子的水,或是无离子的水。
2. What is DI water? 什么是DI水?
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3. Water General Standard
超純水與一般自來水的比較(例子是台北自來水)
自來水
超純水
電阻, MΩ-CM

>
顆粒(Pcs/ml), ≧
104~106
-
顆粒(Pcs/ml), ≧
-
-
顆粒(Pcs/ml), ≧
-
<5
細菌, con/ml
104~106
<
總有機碳, ppb as TOC
1,000~3,000
<1
溶氧, ppb as O2
8,000
<1
矽化物, ppb as SiO2
10,000~20,000
<
金屬, ppb
200,000
<1
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DI Water Specifications
Item
1 M DRAM
4 M DRAM
16 M DRAM
64 M DRAM
Line Width (µ)
-
-
-

Resistivity Mohm @ 25C
>
>
>
>
TOC (ppb)
<30
<10
<3
<1
Pacticles (no./ml)
(µ) <10/ml
(