文档介绍：项目基金:国家自然科学基金资助项目(60708028;60837003)
基于弛豫铁电单晶的红外热释电探测器研究
马学亮123,邵秀梅12,于月华12,李言谨12
(,上海200083
,上海200083
,北京100039)
摘要:热释电非制冷红外探测器在工业、民用探测领域具有广泛的应用。弛豫铁电单晶(1-x)Pb(Mg1/3Nb2/3)O3- xPbTiO3(PMNT)是一种新型热释电材料,具有优异的热释电综合性能。本文重点研究了新型热释电材料PMNT的低损伤减薄工艺、电极成型、耦合封装等关键技术,研制了基于PMNT的单元热释电探测器。对减薄后约30µm晶片材料性能的测试分析表明,×10-4 C/m2 K,无明显衰减。采用低噪声电路提取单元探测器的微弱热释电电流,对所研制的单元探测器性能进行了测试、分析并指出了下一步研究的重点。
关键词:红外、热释电探测器、弛豫铁电单晶、非制冷
Pyroelectric Infrared Detector Based on Relax-based Ferroelectric Single Crystals
Ma Xueliang123, Shao Xiumei12, Yu Yuehua12, Li Yanjin12
( Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083
2. Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083
School of the Chinese Academy of Science, Beijing 100039)
Abstract: Pyroelectric infrared detectors have the advantage of working at room temperature. They are widely used in industrial and civilian field. PMNT single crystal is a novel pyroelectric material with superior pyroelectric performances. The key process of the fabrication of pyroelectirc infrared detectors based on PMNT single crystal, including lapping and polishing of the crystal, metallization and assembly, were ca