文档介绍：华中科技大学
硕士学位论文
大型三维零部件激光精密刻蚀微结构技术研究
姓名:余国虎
申请学位级别:硕士
专业:机械制造及其自动化
指导教师:曾晓雁;曹宇
2011-01-17
华中科技大学硕士学位论文
摘要
随着现代化工业的高速发展,常常需要在诸如飞机机翼及船用螺旋桨等大尺寸
复杂曲面零部件表面加工三维微结构图形,以获得微波发射、传导及耐磨耐蚀等特
殊表面性能。通常的方式是通过五轴联动数控机床进行精密铣/磨削,但是存在高精
度和高效率加工难以兼顾以及无法加工柔性材料等不足。
针对复杂曲面特点,本文根据光线平行投影原理,利用聚焦激光束的焦深特性,
分析介绍了一种全新的复杂曲面上激光投影刻蚀技术,它通过“3+2”轴紫外激光加
工系统中的两维激光振镜进行曲面表面微区域刻蚀,再借助三轴联动数控机床工作
台的移动实现大幅面三维区域刻蚀,从而完成大尺寸复杂曲面零部件表面三维微结
构图形的加工。
本文详细介绍了这种全新的复杂曲面上激光投影刻蚀技术的方案、原理、可行
性、工艺步骤及加工特点等,并对其加工过程中系统误差的来源、模型、综合误差
评估以及误差控制方法等进行了分析,最后通过实验系统研究激光加工工艺参数对
刻蚀精度和质量的影响规律。
研究结果表明,采用该新工艺、新方法的理论加工误差只有几微米,综合误差
评估在 10µm 以内,加工速度可以达到 1000mm/s 以上,并且得到了平面倾角、小栅
格尺寸、激光功率、重复频率、扫描速度以及加工次数等参数对直线宽度、长度、
深度及形貌的影响规律。
上述结果证明了采用这种全新的激光投影刻蚀技术能够在复杂曲面上高效、精
密刻蚀复杂图形,而且具有加工精度高、加工效率高、设备简单、材料适应性强以
及加工成本低等一系列优点,是未来复杂曲面上微结构图形加工技术的一个重要发
展方向。

关键词:激光刻蚀复杂曲面微结构平行投影焦深振镜
系统误差
I
华中科技大学硕士学位论文
Abstract
With the rapid development of modern industry, it is necessary to fabricate
three-dimensional micro-structural textures on the surface of plex surface parts
such as airplane wings and other marine propellers so as to achieve the special surface
properties such as microwave emission, conduction, wear and corrosion, etc. The
traditional way is machining the textures with the five-C machine tools for
precision milling/grinding. This method, however, is not only difficult to take account of
both high precision and efficiency processing, but also impossible to process flexible
materials.
In this dissertation, a novel laser projection etching technique plex surfaces
was introduced in connection with the features plex surfaces, according to the
principle of light parallel projection and by means of the special property of the depth of
focus of focused laser beam. A two-dimensional laser bied with the
three-dimensional working table, defined as "3+2" axis of UV laser processing system,
was established to etch the surface of micro-region. With the help of the movement of
three-C machine tab