文档介绍：MOCVD方法在TiO2纳米粉末制备中的应用
孙一军夏冠群
【摘要】众所周知,MOCVD方法是制备薄膜材料的重要方法之一,现已广泛应用于半导体薄膜、铁电薄膜和超导薄膜等的制备。在以前的工作中,我们设计、加工、安装、调试、建立了一套可计算机自动控制的热壁低压MOCVD设备,制备出了TiO2纳米粉末,得到了一些初步结果。本文详细研究了热壁低压MOCVD方法在TiO2纳米粉末制备中的应用,通过合理设计反应室和收集区域,在采用反应区域和收集区域之间无任何过渡区域的收集方式,制备出了TiO2纳米粉末。采用X射线衍射技术研究了沉积温度对TiO2纳米粉末的晶体结构和平均晶粒尺寸的影响规律。在500℃~1000℃范围内,粉末均为锐钛矿结构,~,700℃条件下制备的TiO2纳米粉末的平均晶粒尺寸最小。透射电子显微镜观察表明,在最佳沉积温度700℃条件下制备的TiO2粉末粒度均匀性好,粒径约为5~8nm。
【关键词】金属有机物化学气相沉积;二氧化钛;纳米粉末
中图分类号:TB44,TB383 文献标识码:A
Application of MOCVD Technology in the Preparation of
Titanium Dioxide Nano Powders
SUN Yi-jun, XIA Guan-qun
(Shanghai Institute of Metallurgy, Chinese Academy of Sciences,
Shanghai 200050, China)
【Abstract】 MOCVD technolgy is one of most timportant me thods in the preparation of thin films, such as semiconductors, ferroelectrics and superconductors. In our previous work, puter controlled MOCVD apparatus was designed and built and titanium dioxide nano powders were prepared. In this paper, we used a new powder collection method to collect titanium dioxide nano p owders. X ray diffraction and TEM were employed to study the effect of temperatu re on the grain sixze of titanium dioxide nano powders. It was found that the s ize of the powders prepared at 700℃ was uniform and about 5 to 8 nanometers. T he optimal temperature was 700℃.
【Key words】 MOCVD; titanium dioxide; nano powders
1 引言
纳米材料的制备、结构和性能的研究已经