文档介绍：11th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference AIAA 2006-7000
6 - 8 September 2006, Portsmouth, Virginia
Reliability-Based Design Optimization for Shape
Design pliant Micro-Electro-Mechanical
Systems
B. M. Adams,∗ M. S. Eldred,† and J. W. Wittwer,‡
Sandia National Laboratories,§ Albuquerque, NM 87185
Reliability methods are probabilistic algorithms for quantifying the effect of uncertain-
ties on response metrics of interest. In particular, pute approximate response
function distribution statistics (probability, reliability, and response levels) based on spec-
ified probability distributions for input random variables. In conjunction with simulation
software, these reliability analysis methods may be employed within reliability-based de-
sign optimization (RBDO) algorithms for designing systems subject to probabilistic perfor-
mance criteria. In this paper, RBDO methods pared and their effectiveness demon-
strated by application to design optimization of microelectromechanical systems (MEMS),
devices for which uncertainties in material properties and geometry affect performance
and reliability. A new tapered beam topology for a pliant bistable mechanism is
presented and its geometry optimized with RBDO to reliably achieve a specified actuation
force, while simultaneously reducing predicted force variability due to material proper-
ties and manufacturing. The optimal designs specified by these optimization processes
are predicted to be reliable, but also more robust to manufacturing process variations.
Software-based MEMS design illustrates challenges faced when applying RBDO methods
in engineering contexts.
I. Introduction
Pre-fabrication design optimization of microelectromechanical systems (MEMS) is an important emerging
application of uncertainty quantification (UQ) and reliability-based design optimization (RBDO). Typically
crafted of silicon, polymers, metals, or bination thereof, MEMS serve as