基于光学法表面粗糙度的测量研究进展.pdf

文档介绍：半导体光电年月第卷第期刘晨等基于光学法表面粗糙度的测量研究进展
《》2010 8 31 4 :

动态综述
基于光学法表面粗糙度的测量研究进展
刘晨卢荣胜陈磊王骏武
1, 1, 2, 1
合肥工业大学仪器科学与光电工程学院合肥南京理工大学电子工程与光电技术学院南京
(1. , 230009;2. , 210094)
摘要表面粗糙度是机械加工中描述表面微观形貌最常用的参数随着现代工业对表面粗
: ,
糙度精度的要求越来越高,提出了许多新的测量方法特别是光学法。介绍了测表面粗糙度的光学
方法:聚焦法、干涉法、散射法和散斑法,分析了它们各自的原理和优缺点及研究概况,在此基础上
提出了一种新的光学测量方法———计算机纹理分析方法。
关键词表面粗糙度光学法测量
: ; ;
中图分类号文献标识码文章编号
:TN247 :A :1001-5868(2010)04-0495-06
Progress of Surface Roughness Measurement Based on Optical Method
LIU Chen1,LU Rongsheng1,CHEN Lei 2,WANG Junwu1
( of Instrument Science and Photoelectric Engineering,Hefei University of Technology,Hefei 230009,CHN;
of Electronic Engineering and Photoelectric Technology,Nanjing University of Science&Technology,
Nanjing 210094,CHN)
Abstract: Surface roughness is a basic parameter in describing the micro-profile of surface
in the accuracy demand for surface roughness in modern industry is higher and
higher,a number of new measurement methods,especially optical method were put
this article,introduced are monly used optical methods in surface roughness
measurement:focus method,interferometry method,scattering method and the speckle method,
and their respective advantages,defects and study progresses are this base,a new
kind of optical measureme