文档介绍：纳米 Mo 膜的光学常数研究
(物理科学学院应用物理系李观)
(学号:2002145046)
【摘要】本论文首先简要介绍了薄膜光学常数的研究方法,然后着重介绍了用反透法
确定薄膜的光学常数。根据测定的纳米 Mo 膜的反射率和透射率,应用专用的程序对纳米
Mo 膜的光学常数进行计算。主要针对离子束溅射的光学常数数据进行了计算和分析,同时
也对磁控溅射的光学常数数据进行了计算和分析,研究同一厚度时不同波长的纳米 Mo 膜的
光学常数,得到同一厚度时纳米 Mo 膜光学常数随波长变化的规律;研究同一波长时纳米
Mo 膜随厚度变化的光学常数,得到同一波长时纳米 Mo 膜光学常数随膜厚变化的规律。结
果表明,离子束溅射沉积成膜的光学常数规律与磁控溅射成膜的光学成数规律有所不同;
离子束溅射沉积成膜的 Mo 膜在较薄和较厚时,光学常数的变化规律不相似,在 12nm-110nm
时,光学常数的变化规律比较相似;磁控溅射沉积成膜的Mo 膜光学常数比离子束溅射沉积
成膜的 Mo 膜的更加复杂。
【关键词】离子束溅射磁控溅射纳米 Mo 膜光学常数
【教师点评】论文对纳米 Mo 膜的光学常数进行了研究,应用反透法对不同厚度、不
同波长及不同制备方法下 Mo 膜的光学常数进行了计算和分析,并与块状时的 Mo 材料光学
常数进行了比较,得到了很有价值的结论。近来,Mo 膜已广泛用于太阳能厚膜电池 CIS 的
底电极。对 Mo 膜的光学常数研究意义重大。论文论述清楚,数据可靠,分析合理。(点评
教师:范平)
(指导教师:范平)
【Abstract】This paper first generally introduces the research methods of optical constants of
thin films, and then mainly introduces optical constants of thin films by the method of
reflectivity-transmittance. Basing on the reflectivity and transmittance of Mo nano-films have
been measured, special program is applied to calculate the optical constants of Mo nano-films.
This program is mainly used to calculate and analyze the optical constants of ion bean sputtering
deposited films and that of ron-sputtering deposited films. With the program, optical
constants of Mo nano-films of the same thickness and different wavelength have been studied, we
reach a rule that the optical constants of Mo nano-films of the same thickness would change as the
wavelength changes; while the optical constants of Mo nano-films of the same wavelength have
been studied, which changes as its thickness changes, we reach a rule that the optical constants of
Mo nano-films of the same wavelength would change as its thickness changes. the results show,
there is a difference between the optics constant rule that ion bean sputtering deposited films and
the optical constants rule that ron-sputtering deposited films. When the ion bean sputtering
deposited film is rather thin and rather thick, the o