文档介绍：华中科技大学
硕士学位论文
高灵敏度环形磁通门传感器的研究与设计
姓名:干露
申请学位级别:硕士
专业:微电子学与固体电子学
指导教师:杨晓非
20080530
华中科技大学硕士学位论文
摘要
磁场传感器在精密遥感定位,武器侦查,交通工具探测等方面具有及其有极其广
泛和重要的应用。如何探测微弱磁场,例如 10-11-10-4T,是其中的难点和关键。磁通
门具有极高的分辨率(-10nT)和温度稳定性(30ppm/℃),因此是最具潜力用于探
测微弱磁场的电子器件。
本文对磁通门传感器的国内外相关文献进行了比较深入地调研,重点描述了单芯
型和双芯型磁通门传感器的工作原理,对目前常用的磁通门信号检测方法:如谐波选
择法、脉冲幅值法、脉冲间隔法和脉冲宽度法进行了分析和比较。在此基础上根据弱
磁场测量的特性和要求,设计和制备了环形磁通门传感器。以 VITROVAC 6025Z 作
磁芯材料、卷绕形成环形铁芯而成。激励频率为 ,在开环条件下采用二次
谐波检测的方法进行信号检测。实际测量显示,制备的磁通门样机的灵敏度达到
×104V/T。
本文利用有限元分析软件 ANSYS 建立了磁通门有限元计算模型,采用
软件的频谱分析功能获取感应电动势的二次谐波分量,推导出磁通门传感器的灵敏
度。模拟计算的结果将为磁通门传感器的结构设计提供了重要的参考依据。

关键词:磁通门传感器,磁场测量,软磁材料,有限元模型

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华中科技大学硕士学位论文
Abstract
ic sensors have been an essential function for numerous applications; precise
geophysical instruments, detection of ic objects such as weapons and vehicles,
and so on. How to detect the magnitude and direction of weak ic field (10−11 to
10−4 T) plays an important role in this field. With a resolution of –10 nT and a high
temperature stability(30ppm/℃), the fluxgate sensors serve for the precise measurement of
the ic field.
The reference papers about fluxgate sensors are studied. the working principle of
single core and double core sensors have been stated, and the signal detection methods
currently used in the flux-gate technique have been introduced: second harmonic,pulse
amplitude,pulse interval and pulse width. Based on characteristics and requirements of
weak ic field detection, a ring-core fluxgate sensor is designed and fabricated. A
metallic ribbon position VITROVAC 6025Z is chosen as the ic ring-core and
square waveform is used as the excitation frequency. The second-harmonic
fluxgate ometer has been tested in open-loop. Experimental results show sensitivity
is ×104 V/T.
The finite element model of fluxgate is built by applicating the Finite Element
Analysis Software ANSYS. And the second ponent of induced electromotive