一种基于薄膜体声波谐振器的高频滤波器设计.doc

文档介绍：
一种基于薄膜体声波谐振器的高频滤波
器设计#
张智欣,逯遥,庞慰,张代化,张浩**
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(天津大学精密仪器与光电子工程学院,天津 300072)
摘要:本文提出了一种基于薄膜体声波谐振器(FBAR)的高频 C-Band 带通滤波器设计方
法。由此得到的滤波器实测结果,通带中心()插入损耗小于 dB,带外抑制大于
50 dB,且测试数据与三维电磁仿真结果相吻合。并在此基础上介绍了一种提升滤波器带外
抑制的方法,即在滤波器两个并联谐振支路之间增加一个电容,通过移动传输零点来改善带
外信号衰减程度。此方法增加了 FBAR 滤波器设计在满足带外抑制方面的灵活性。
关键词:射频 MEMS;高频 C-band;薄膜体声波谐振器;射频带通滤波器
中图分类号:TN385
A High Performance C-Band FBAR Filter
ZHANG Zhixin, LU Yao, PANG Wei, ZHANG Daihua, ZHANG Hao
(College of Precision Instrument and Opto-electronics Engineering, Tianjin University,Tianjin
300072)
Abstract: In this paper a RF band pass filter in C-band based on film bulk acoustic resonator (FBAR)
technology is developed. The measured insertion loss is less than dB at the center frequency
() of the filter, and the signal attenuation near the pass band of the filter is greater than 50 dB.
The measurement data are in good agreement with the design employing three dimensional
ic simulation techniques. A method to move the transmission zeros of the FBAR filter is
proposed by adding a capacitor element between the two shunt branches of the filter. Using the
technique, an FBAR filter chip can be configured to meet different rejection specifications potentially.
Key words: RF MEMS; high frequency C-band; FBAR; RF band pass filter.
0 引言
随着无线通信系统的高速发展,射频频谱范围已由几百兆赫兹扩宽到几吉甚至几十吉赫
兹。而用于处理高频信号的射频