文档介绍：摘要本论文对飞秒激光应用于微纳加工领域进行了部分理论与实验研究工作。论文的主要内容包括: ;基于超短激光脉冲烧蚀过程中,电子与晶格的温度不平衡性,分别模拟了这两个系统的温升过程,并由此得到了单脉冲烧蚀深度:通过调整激光输出功率, 研究了脉冲能量对烧蚀深度的影响,模拟结果表明,随激光脉冲能量的增加,相变爆炸(phaseexplosion)弓}起的喷射出现的越早,同时材料烧蚀深度增加:理论计算与实验结果相吻合。。采用几种方法改进加工的质量,在此基础上进行了下述研究工作: 。实现了在各种厚度铜薄片上的深孔加工,得到的孔具有很高的质量,孔的入口和出口均有较好的几何形状。 。使用飞秒激光进行微纳尺寸、高速、高质量的金属切割。 。对光路进行调制,提高加工效率。。理论分析得到飞秒激光参数、平台移动速度对线宽的影响,进行了系统的加工实验,加工结果与理论分析基本吻合:在透明有机材料P删A表面进行了多种光栅的刻划,并对刻划的光栅进行了衍射和色散测试,调整光栅的尺寸和排列方式,得到了形状各异的衍射图案。关键词: 飞秒激光,微纳加工,加工工艺,深孔加工,微结构光栅 ABSTRACT Inthisdissertation,part oftheoretical andexperimental studies on theapplication offemtosecond laser inmicro-nanomachining field aye main contents inthisdissertation ayeclassified asfollows. ablation processing ofcopper foilwithultrashortlaserpulses Was simulated by theDouble—Temperature Equation(DTE),which was formatted ablation rate ofthecopper was attained OU thebasisofthesimulation oftheelectronic and lattice’ simulation results show that the greater the laserfluence the longer the duration of ablation lastsand more material experimental resultsaye accorded with thetheoreticalanalysis. our investigations on machining techincs athigh laserfluence,mercial femtosecond laserworkstation methods are adopted toimprove the qualityofmachining,and atthesame timesome researches are carried out asbelows. (a).Drilling experimental reserches:the drilledholeshave very good cylindrical geometry andhigh quality. (b).Cutting experimental reserehes:with micro-nano size,highspeed,greatquality, cuttingcopper foilexperiments ale finished. (c).Masking:In order toimprove theefficiency ofmachining,the beam of femtosecond laser ismodulated by mask. on ablation with femtosecond laser on the surface anic material(PMMA)has relationship between the characters of femtosecond laser