文档介绍：I 摘要光开关作为新一代全光光网络的关键器件在实现光层面上的路由选择波长选择光交叉连接和自愈保护等方面有着广泛应用聚合物热光光开关由于具有制作工艺简单开关性能良好消耗功率低等特点世界各大通信器件公司均已对其开展了大量的研究开发工作本文的主要工作围绕聚合物热光光开关的重要组成部分热电极展开设计优化了具有矩形电极结构的热光光开关提出了弧形电极的概念并与矩形电极进行了比较研究了制作工艺误差对开关性能的影响具体包括以下内容首先简单讨论了热光效应和Y分支型热光光开关的工作原理并简单介绍了热电极设计的基础热传导理论其次介绍了几种常用的热光系数测量方法详细叙述了利用棱镜耦合仪测量聚合物热光系数的过程并精确测量了聚合物材料的热光系数为光开关热电极的设计打下了基础接着确定了光开关热电极和引线的材料并根据开关时间金属电极产生的损耗以及波导光纤之间的耦合效率与光开关结构上覆盖层的厚度之间的关系确定了上覆盖层的厚度最后对具有矩形电极的光开关结构进行了优化设计提出了弧形电极的概念并与矩形电极进行了比较跟据金属薄膜电阻率理论计算出了电极的厚度研究了电极宽度误差掩模套刻误差电极厚度误差等工艺误差对开关性能的影响以及光开关的波长响应特性由于热电极结构直接决定了热光开关的性能本课题的研究为制作高性能的热光开关打下了基础具有重要的实用价值关键词集成光学平面波导器件聚合物热光开关热电极 II Abstract Optical switch plays a key role in ing new-generation works. It has a wide application in router switching, wavelength switching work protection on optical level. Polymeric thermo-optic switch has been attracted much attention in recent years due to its advantages including easy manufacturing, good performance and power saving. This thesis presented our research work on an ponent of the polymeric thermo-optic switch, the heater. And the thesis anized as the following consequence. Firstly, we briefly discussed the thermo-optic effect and the mechanism of Y-branch thermo-optical switch. And then the foundation of heater designing, the theory of heat conduction is introduced. Secondly we interpreted several methods to measure the thermo-optic coefficient. Among them we discussed the method of using prism coupler in greater details. Based on this method, we also measured the thermo-optic coefficient of polymer, which is an important parameter for heater designing in optical switch. And then, we determined the material of heater and electrode in optical switch and also decided the thickness value of the up-cladding according to the relationship among thickness of up-cladding, switching time, the attenuation produced by metal material as well as the coupler efficiency of waveguide and optical fiber. Finally, we designed two heater structures, namely rectangle heater and arc heate