文档介绍：第43卷第1期 2013年1月激光与红外 LASER INFRARED Jalluary,2013 文章编号:1001-5078(2013)01枷14m5 飞秒激光微加工的研究进展·综述与评论· 顾理1’。,孙会来1”,于楷3,赵方方k2 (,天津300387;, 四川成都610039;,辽宁铁岭112000) 摘要:综述了近年来国内外利用飞秒激光微加工的研究进展。飞秒激光脉冲作为材料微纳加工的一项工具,已经从实验室进入到工业化阶段。介绍了飞秒激光在微纳加工领域的一些研究情况,分别就飞秒激光烧蚀微加工以及双光子聚合加工进行了阐述。最后分析了飞秒激光微加工目前存在的问题及未来发展的主要方向。关键词:飞秒激光;微加工;烧蚀;双光子聚合中图分类号:TN249 文献标识码:A DoI:.1001- Research progress ofmicr0- by femtosecond laser GU Lil’-,SUN Hui—lail”,YU Kai3,ZHA0 Fang—fan91,2 ( ofMechanical Engineering,Tianjin Polytechnic University,Tianjin 300387,China; Laboratory ofManufacturing and Automation,Xihua UniVersity,Chengdu 610039,China; Equipment Department Hong Kong and China GasCo.,Ltd.(Towngas),Tieling112000,China) Abstract:The articlereviews the progress by femtosecond laser home and abroad in recent laserpulses have undergone thmu曲the 1aboratory pmcess e ausefultoolformaterial mi- cm—nano—proce8sing inindustrial thispaper,we introduce the process offemto·second laser precise micro— difkrent fabrication mechanisms are described which are laserablationand two photopolymeriza. ,the existingpmblems andfuturedevelopment ofmicm-manufacture by femtosecond laser are discussed. Key words:femt