用于超高密度存储的硅基纳机电探针.pdf

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真空科学与技术学报第 25 卷第 6 期

224 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY(CHINA) 2005 年 11、12 月

用于超高密度存储的硅基纳机电探针
阵列器件研制
杨尊先1 于映1 李昕欣2
1 福州大学电子科学与应用物理系福州 350002 ;
2 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室上海 200050
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3 Fabrication of Nanomechanical2 Electro thermal Probe Array for
Ultrahigh Density Storage
Yang Zunxian1 ,Yu Ying1 and Li Xinxin2
1 Department of Electronics Science and Applied Physics , Fuzhou University , Fuzhou ,350002 , China;
2 Shanghai Institute of Microsystem and Information Technology , Chinese Academy of Sciences , Shanghai ,200050 , China
Abstract A novel type of silicon based ,mechanical ,electro thermal probe array has been essfully developed for high density data
storage. In addition to theoretical analysis and finite element simulation ,bination of crossdisciplined technologies have been used in its
design and fabrication ,including fabrication of silicon nano tip and high electrical insulation resistive heater ,as well as the integration of heater
and piezo resistor on nanometer scale electro mechanical system (NEMS) probe and (micro ) nano machining. We found that the piezo resis
tive sensitivity of the cantilever and the tip ,with its apex diameter less than 40 nanometer ,work well in high density storage. An electrothermal
model was d