文档介绍：上海交通大学
硕士学位论文
半导体工厂测试车间布置研究
姓名:孟明宇
申请学位级别:硕士
专业:工业工程
指导教师:蒋祖华;李树刚
20080101
上海交通大学工程硕士学位论文摘要
半导体工厂测试车间布置研究
摘要

随着半导体产业的不断发展与壮大,诞生了很多基于半导体生产
的新鲜产业。MEMSIC,就是这样一家从事微机电系统设计与生产
的企业。经过 8 年的艰苦创业,工厂不断扩大,于是工厂实施的科
学布局问题并应运而生。
车间布局设计是制造系统设计的重要内容之一,车间布局的优劣
直接决定着产品质量、生产率和经济效益。
SLP(系统布置规划)是工业工程领域中工厂设计的一项技术。它
在设计过程中将各单元的相互关系通过量化的指标表现出来,并以
此为基础安排布局。
作为一个特殊的半导体工厂,MEMS 测试车间的布局,因为其
特殊的工艺设备因而具备一定的特殊性。
本课题正是针对这一项目背景,从系统设施布局(SLP)这一基
本的理论体系出发,展开了对半导体测试车间布局需求、要素、物
流关系、非物流关系等方面的分析,给出了几个布局的预选方案,
同时采用系统因素评价法对三个方案进行评估,优选,最后对最优
方案进行了详细布局。
实践证明,这样的思路和方法是正确的,成功的。我们可以将这
样的研究进一步拓展到整个 MEMS 半导体工厂,乃至相似的行业。
关键词:车间布局,半导体工厂,微机电产品,测试车间
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上海交通大学工程硕士学位论文 ABSTRACT
RESEACH ON TEST WORKSHOP LAYOUT OF
SEMICONDUCTOR FACTORY
ABSTRACT
Quite a few new product e forth with the rapid development
of semiconductor Manufactory. As one of them, after enjoying the
growing pain for 8 years, MEMSIC, pany focusing on design &
producing Micro-Electronic-Mechanical-System (MEMS), now es
a world leading MEMS producing center.
As one of the key issues of the Manufactory Design, good workshop
layout will lead to better product quality, better line efficiency and more
revenue.
SLP (Systematic Layout Planning) is a technique for facility design in
IE field, which runs the layout process by digitalizing all the relationships
among all the cells associated.
As a special semiconductor factory, layout for MEMS test workshop
owns its specialty for its specific processes and machines.
Based on that, this project started with the SLP theory, analyzed all
the aspects about the layout: requirements, factors, logistic relations, non-
logistic relations, etc., came out to several layout solutions, and finally,
finished the detail placement after systematic evaluation.
The whole methodology is proved by practice, and is valuable for
extending to the whole manufactory and similar industry.
Keywords: SLP, Semiconductor Manufactory, MEMS Product, Test
Workshop
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