vapour phase deposition of cubic boron nitride开题资料.pdf

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ELSEVIER Diamond and Related Materials 5 (1996) 501 507
Vapour phase deposition of cubic boron nitride
Toyonobu Yoshida
Department of Metallurgy and Materials Science, School of Engineering, Faculty of Engineering, The University of Tokyo, Hongou,
Bunkyo-ku, Tokyo 113, Japan
Abstract
This paper reviews the "state-of-the-art" of the vapour phase deposition of cubic boron nitride (cBN) in terms of the nucleation
and growth processes on ion bombardment, and provides an insight into the solution of the inherent disadvantages of ion-assisted
processing for cBN deposition. To this end, current experimental and theoretical topics related to the vapour phase deposition of
cBN are examined, and the initial growth stage is discussed in conjunction with recent findings derived from novel sputtering and
plasma chemical vapour deposition. Finally, a qualitative growth scheme of cBN is proposed based on the concept of dynamic
compres