文档介绍：Design of a MEMS-based total phosphorus sensor
with a microdigestion system
Jianhua Tong, Chao Bian, Yang Li, Yin Bai, Shanhong Xia
Institute of Electronics
Chinese Academy of Sciences
Beijing, China
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Abstract—This paper presents the design of a novel cover slip waster outlet
microelectromechanical system (MEMS)-based total phosphorus
(TP) microsensor with a microdigestion system. Cobalt metal film micro-digestion well
is introduced as the sensing material of the microelectrodes, and sample solution inlet
a micro digestion bioreactor is used as the microdigestion unit.
The sensing mechanism of the cobalt electrodes to the
concentration of phosphate ions is demonstrated. The structure
of the microdevice is designed, and the fabrication processes are
presented. A preliminary testing experiment of cobalt-based
microelectrodes is achieved in this paper, and the result shows a
linear relationship between the potentiometric response and the sensing electrodes
concentration of phosphate ions in the buffer solution.
cleaning solution
Combining the microdigestion system that is under fabrication,
inlet heater & sensor
this microsensor may lead to a fully automatic measurement for (backside)
total phosphorus in the water environment monitoring. digestion solution inlet
channels for thermal-isolation
Keywords-