文档介绍：Annealing Effects on Properties of Pure and Iron
Doped Nano-TiO2 Films Prepared by Reactive
ron Sputtering
Wenjie Zhang, Ruyuan Li Ying Li, Shenglong Zhu, Fuhui Wang
School of Environmental and Chemical Engineering State Key Laboratory for Corrosion and Protection
Shenyang Ligong University Institute of Metal Research
Shenyang 110159, China The Chinese Academy of Sciences
metalzhang@ Shenyang 110016, China
Abstract—Pure and iron doped TiO2 films were prepared by In our previous work, pure and iron doped TiO2 films were
means of pulsed DC reactive ron sputtering method using deposited on glass substrate by means of dc reactive ron
pure and mixed titanium and iron targets. The TiO2 films were sputtering method [12,13]. A mixed iron-titanium target was
deposited on microscope glass slides. The photocatalytic activity set up to facilitate co-sputtering of both metals. Structural and
of the TiO2 films was evaluated by measuring the degradation photocatalytic activities of these films were studied. In this
rate of aqueous methyl orange on the films under UV irradiation.
Structure properties of the films and the effects on photocatalytic paper, the films were annealed after deposition and the effects
properties after annealing were investigated. The films were were investigated.
adhered on the substrates properly before annealing, wherea