文档介绍：Sensors and Actuators A 116 (2004) 39–44 Contactless 360 ?absolute angular CMOS microsystem based on vertical Hall sensors Michel Demierre a , ?, Enrico Schurig a, Christian Schott b , Pierre-André Besse a, Radivoje S. Popovi ′ c a aSwiss Federal Institute of Technology, Institute of Microelectronics and Microsystems, CH-1015 Lausanne, Switzerland bSENTRON AG, CH-6300 Zug, Switzerland Received 28 April 2003; received in revised form 15 March 2004; accepted 18 March 2004 Available online 10 May 2004 Abstract We have developed the ?rst 360 ?contactless absolute angular microsystem using a CMOS two-dimensional vertical Hall sensor. The microsystem contains two groups of vertical Hall sensors, mutually oriented at 90 ?, plete readout electronics. The spinning current method is used to extract the signals from the sensors. Projections onto two orthogonal axes of the external rotating ic ?eld give the rotation angle sine and cosine functions, respectively. From these two output signals, the rotation angle is extracted using the four quadrant inverse tangent function without discontinuity or dead angle over 360 ?. An angular accuracy of less than ± ?( ±%) at room temperature with only the Hall sensors’ residual pensation is obtained. Using gain mismatch and pensation, an outstanding accuracy of ± ?( ±%) is achieved. ?2004 Elsevier . All rights reserved. Keywords: