文档介绍：中文摘要
中文摘要
SnO2 作为一种广谱型的气敏材料，在 60 年代就成为了研究和应用的热点，并
且发展的速度非常快。它在太阳能电池以及电极，锂离子电池，液晶显示等领域
都有出色的表现。SnO2 是目前最常见的气敏材料之一，它对工作温度要求低，选
择性好，灵敏度高，被广泛应用于检测各种敏感气体器件中。
本课题是在大量的学****和实验中完成的。首先讨论了 SnO2 的工作原理，设计
出传感器的结构，包括硅杯的制备和电极制备等。然后选择两种方法制备 SnO2 敏
感膜，一种是溶胶凝胶法制备，另一种是以嗜热链球菌为模板法制备。对两种方
法获得的敏感膜进行了表征，如原子力显微镜（AFM）、X 射线衍射（XRD）、透
射电子显微镜（TEM）等。选择不同的退火温度，得出结晶度好的薄膜。最后对
传感器进行了测试和分析，分别对两种方法制备的薄膜进行了详细讨论，包括灵
敏度、选择性、重复性以及响应和恢复时间等参数，并且将得到的数据进行对比
分析。
关键词：乙醇传感器；溶胶-凝胶；SnO2 薄膜；SnO2 中空球
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黑龙江大学硕士学位论文
Abstract
As a kind of broad-spectrum type gas sensor materials, SnO2 has been became the
focus of research and application, and developed quicked. It does well in solar cell and
electrode, lithium ion battery, LCD, and other fields. SnO2 is currently one of the most
common gas sensitive material, its working temperature requirements is low, good
selectivity, high sensitivity, and is widely used in the detection of various gas sensitive
components.
This paper has been done with much study and experiments. First I discussed the
working principle of SnO2, designed the structure of the sensor, including the
preparation of the silicon cup and electrode preparation. Then select two methods of
preparation of SnO2 sensitive film, one is the sol-gel method, another is the template
method by streptococcus thermophilus. I carry on the various characterization of
sensitive film, such as atomic force microscopy (AFM), X-ray diffraction (XRD),
transmission electron microscopy (TEM), and so on. Choosing different annealing
temperature is to obtain the crystallinity of good films. Finally, I carry out various tests
and analysis, preparation of thin films of two kind