文档介绍：认识Mask
TM
精品资料
你怎么称呼老师？
如果老师最后没有总结一节课的重点的难点，你是否会认为老师的教学方法需要改进？
你所经历的课堂，是讲座式还是讨论式？
教师的教鞭
“不怕太阳晒，也不怕那风雨狂，只怕先生骂我笨，没有学问无颜见爹娘 ……”
“太阳当空照，花儿对我笑，小鸟说早早早……”
The Role of Mask in IC Industry
DESIGN
MASK
WAFER
TESTING
ASSEMBLY
How Does Mask Work in Wafer FAB
-------Stepper
How Does Mask Work in Wafer FAB
-------Scanner
Raw Material of Mask
Blank
BIM (binary mask)
PSM (phase shift mask)
A. KRF-PSM
B. ARF-PSM
Size of Blank
5inch 90mil(5009) 5inch 180mil(5018)
6inch 120mil(6012) 6inch 250mil(6025)
7inch 250mil(7015)
What kind of mask SMIC FABs use?
Blank Component
Binary Blank
PSM Blank
Photo Resist(3K,4K,4650A)
CrO&Chrome(~1050A,700A)
Quartz
Photo Resist(2K,3K,4KA)
CrO&Chrome(1000,~550A)
Quartz
MoSi Film
Photo Resist
Opaque Metal Film
Substrate
Photo Resist
Opaque Metal Film
Phase Shift Layer
Substrate