文档介绍：News Update Technology: Competitive & Complementary
Atom-based standards for 50nm Sonochemicals
Device features on computer marks on a ruler to measure configured as a 9x11mm chip Using high-intensity ultra-
chips 40nm wide can be meas- dimensions of the test struc- embedded in a Si wafer, are sound, researchers at the
ured reliably, thanks to new test tures. Industry uses reference being evaluated by Sematech University of Illinois at
structures from a multi-discip- materials to calibrate tools for members. Compared to 2001 Urbana-Champaign have creat-
linary and organisational team reliable measurements. prototypes, new reference ed hollow nano-spheres and
at Commerce Department’s materials offer a wider range of
“We have caught up to the the first hollow nanocrystals.
NIST,SEMATECH,Accurel sizes, some much narrower
semiconductor roadmap for The nanospheres could be
Systems Int. Corp and VLSI and more precise, (uncerta