[生产工艺技术]CMOS的工艺技术.pdf

文档介绍：: .
CMOS工艺流程∶
CMOS
Wafer Fabrication
Process
Technology
CSMC-HJ
​ : .
CMOS
Starting with a silicon waferCross Section of the Silicon WaferMagnifying the Cross Section
​ : .
CMOS n/p-well Formation
Grow Thin OxideDeposit NitrideDeposit ResistUV ExposureDevelop ResistEtch Nitriden-well ImplantRemove Resist
​ silicon substrate : .
CMOS n/p-well Formation
Grow Oxide (n-well)Remove Nitridep-well ImplantRemove OxideTwin-well Drive-inRemove Drive-In Oxide
p-well n-well
​ silicon substrate :