文档介绍：Modeling and Real-Time Feedback Control of
MEMS Device
Limin Wang
Dissertation submitted to
The College of Engineering And Mineral Resources
at West Virginia University
In partial fulfillment of the requirements for the degree of
Doctor of Philosophy
in
Electrical Engineering
Advisory and mittee Members:
Parviz Famouri, . Chair
Larry A. Hornak, .
Mark A. Jerabek, .
Matthew C. Valenti, .
Marcello R. Napolitano, .
Lane Department puter Science and Electrical Engineering
Morgantown, West Virginia
2004
Keywords: MEMS, System Identification, Real-time Feedback Control
ABSTRACT
Modeling and Real-Time Feedback Control of MEMS Device
Limin Wang
Applying closed-loop control to a MEMS devices not only can handle the
abnormal behaviors caused by manufactory imprecision or device failure, enabling
MEMS devices to survive in critical conditions, but also can increase the application
where MEMS devices are used to ponents under varying load conditions. This
study mainly focuses on the effort of closed-loop control on the b Resonator
(LCR) MEMS device. The ess of closed-loop control has been achieved on lateral
comb resonator with novel integrated through wafer optical monitoring technique [1].
Availability of a system model and feedback signals are mandatory conditions for
the implementation of closed-loop control. Because of the fabrication process tolerance,
the parameters of the b Resonator (LCR)’s model, especially the damping
parameterβ, cannot be determined accurately based merely on theoretical analysis.
Therefore, performing system identification through experiments can be a tool to verify
the system model. Three different system identification methods in both the time domain
and frequency domain have been implemented, and the results agree.
Noise analysis on the optical monitor