文档介绍：Abstract In a lot of laser applications such as material processing,surgery,semiconductor lrin&laser fusion and holography,the property non-uniform intensity distribution ofthelaserbe锄limits we musttransform theGaussian beam tothe beam has uniform intensity present Chinese researchers mostly use aSpheric lensgroup,the diffraction optical elements or spatial modular to obtainbe锄 isliUle one use microlens array(MLA)as the key element of array homogenizer has advantages of simple structure,low manl】fa曲lre costand no sensitive tochanges ing that study onthe homogenizer based on microlens array hasgreatsignificant and application value· This paper mainly study the two structure ofhomogenizers based on microlens array, wKch are calleddiffracting one andimaging first,I derived themathematical e)【Dression oftwo structure homogenizer’s intensity distribution oftarget surface based onthe theory tOthegeometrical opticalformula,we obtained the relationship ofbeam size oftarget surface then tosimulate the e虢ct ofFresnel number on homogenized spot by MATLAB software on thebasis of di伍阻ction ,we got equivalent models oftwo structure microlens array homogenizer by used operator ,we analyzed interference effect on laSt 、Ⅳ:hen use collimated laser assource,for high coherent laserhigh contrast pointarrays inevitably appear on homogenization. We calcdated the measured pared withthe theoretical results derived fom nleformula afterbuilding diffracting andimaging microlens array homogenizers test proved thatthe microlens array homogenizers model built in paper are correct illustratedthatusing microlens array asthe ponents oI a laserbeam homogenizer isfeasibility andefficiency. Keyword:beam shaping,microlens array,homogenize,Fresnel number,coherence 硕士学位论文基于