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2005 年第 12 期·工艺与装备·
文章编号:1001 - 2265(2005) 12 - 0083 - 03
纳米级 XY 微定位平台的设计与研究
田延岭1 , 张大卫1 , 闫兵2
(1. 天津大学机械工程学院, 天津 300072 ; 2. 天津工程师范学院机械工程系, 天津 300222)
摘要:为了实现二维平面纳米级定位,研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台。该微定位平台具有
高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足,采用杠杆放大机构增加微定位平台
3 的位移输出。考虑驱动电路的影响,建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性,试验
结果表明微定位平台的分辨率为 5nm ,固有频率分别为 143Hz 和 180Hz。该微定位平台可应用于纳米级的微定位。
关键词:微定位平台; 压电陶瓷驱动器; 动态性能
中图分类号:TG502. 3 文献标识码:A
Development and Investigation of a XY Micropositioning Table
TIAN Yan ling1 , ZHANG Da wei1 , YAN Bing2
(1. School of Mechanical Engineering , Tianjin Univerity , Tianjin 300072 , China ; 2. Department of Mechanical
Engineering , Tianjin University of Technology and Education , Tianjin 300222 , China)
Abstract : In order to realize 2 dimensional nanometer level positioning , this paper presents a piezoelectrically driven micropositioning table
with high stiffness and resolution. A flexure hinge mechanism is utilized to guide the moving part and to provide preload for the piezoelectric
actuators. The lever amplifiers are used to enlarge the working range of the moving platform. The dynamic model of the micropositioning
table has been established with consideration of the driving circuit. A series of experimental testing is carried out to verify the performance
of the micropositioning table. From the ex