文档介绍：: .
Series 180 Instruction Man
IMPORTANT CUSTOMER NOTICE
Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting
from the use of Sierra Instruments standard mass flow meters or controllers for oxygen gas.
You are responsible for determining if this mass flow meter or controller is appropriate for
your oxygen application. You are responsible for cleaning the mass flow meter or controller to
the degree required for your oxygen flow application.
© COPYRIGHT SIERRA INSTRUMENTS 2007
No part of this publication may be copied or distributed, transmitted, transcribed, stored in a retrieval
system, or translated into any human or computer language, in any form or by any means, electronic,
mechanical, manual, or otherwise, or disclosed to third parties without the express written permission
of Sierra Instruments. The information contained in this manual is subject to change without notice.
TRADEMARKS
Smart-Trak™ and Max-Trak™ and Dial-A-Gas™ are trademarks of Sierra Instruments, Inc. Other
product and company names listed in this manual are trademarks or trade names of the