Modeling-and-modification-of-the-parallel-plate-variable-MEMS-capacitors-considering-deformation-issue_2009_Mechanism-and-Machine-Theory.pdf

文档介绍：Mechanism and Machine Theory 44 (2009) 647–655
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Mechanism and Machine Theory
journal homepage: ate/mechmt
Modeling and modification of the parallel plate variable MEMS
capacitors considering deformation issue
Binzhen Zhang a, Dongming Fang b,*
a National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan 030051, . China
b Institute of Microelectronics, Peking University, Beijing 100871, . China
article info abstract
Article history: For electrostatically actuated parallel plate variable capacitors in conventional theory, pull-
Received 22 June 2007 in occurs when the deflection of the movable plate is one-third of the original air gap. How-
Received in revised form 2 December 2008 ever, the electrostatic force is nonlinear, only the center of the movable plate nearly fully
Accepted 17 December 2008
reached their maximum displacement when pull in occurs. In this paper, formulas for cal-
culating the capacitance of two plates with an angle are presented. We model the deforma-
tion of the movable plate and analyze the mechanical behavior of the capacitors. We
fabricated the parallel plate variable MEMS capacitors and used WYKO NT1100 optical sur-
Keywords:
face profiler to measure the displacement related with deformation. The results show that
Capacitor
MEMS the theoreti