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多晶硅硅锭晶体生长.doc

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多晶硅硅锭晶体生长.doc

上传人:zbfc1172 2018/6/3 文件大小:48 KB

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多晶硅硅锭晶体生长.doc

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文档介绍:Schematic of a directional solidification furnace.
the schematic of the heat zone in a DSS station together with the key heat loss in the system from the top, side and bottom insulation by conduction labeled as Q1, Q2, and Q3, respectively, and from the bottom of the heat-exchange block to the cold surrounding by radiation labeled as Q4. The furnace is well insulated to ensure no large temperature gradient in the heat zone. The silicon charge is loaded into a fused silica crucible with 69*69*46 cm3, and the height
of the ingot is 24cm with a mass of approximately 240kg. To obtain a higher productivity, the ingots with the mass of 275kg are generally produced in such a furnace by increasing the height of the crucible. The graphite susceptor surrounds the crucible, and the resistive heaters provide heat to the susceptor and consequently to the silicon feedstock in an attempt to achieve a uniform temperature distribution. A heat-exchange block is installed at the bottom of the susceptor to take heat away from the system. The side insulation layer is moved upwards, while the crucible remains stationary in order for the growth system to release the energy from the heat-exchange block and achieve a desired cooling rate as well as an ingot growth rate. The thermocouples and optical pyrometer are installed to monitor the temperature at the specified locations through