文档介绍：W. R. Fahrner (Editor)
Nanotechnology and Nanoelectronics
Materials, Devices, Measurement Techniques
W. R. Fahrner (Editor)
Nanotechnology and
Nanoelectronics
Materials, Devices, Measurement Techniques
With 218 Figures
4y Springer
Prof. Dr. W. R. Fahrner
University of Hagen
Chair of Electronic Devices
58084 Hagen
Germany
Library of Congress Control Number: 2004109048
ISBN 3-540-22452-1 Springer Berlin Heidelberg New York
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Preface
Split a human hair thirty thousand times, and
you have the equivalent of a nanometer.
The aim of this work is to provide an introduction into nanotechnology for the sci-
entifically interested. However, such an enterprise requires a balance between
comprehensibility and scientific accuracy. In case of doubt, preference is given to
the latter.
Much more than in microtechnology – whose fundamentals we assume to be
known – a c