文档介绍：SINGLE-STEP ASSEMBLY OF
COMPLEX 3-D MICROSTRUCTURES
Elliot E. Hui, Roger T. Howe, and M. Steven Rodgers*
Berkeley Sensor & Actuator Center, University of California, Berkeley, CA 94720-1774, USA
*Intelligent Micromachine Dept., Sandia Natl. Laboratories, Albuquerque, NM 87185-1080, USA
ABSTRACT Concept
This paper describes three-dimensional micro- The problem of assembling three-dimensional
structures fabricated in a planar process and structures from surface micromachined parts is
assembled in a single step. Multiple plates are very similar to the problem of creating the
constrained by hinges in such a way as to three-dimensional structures that spring out of
reduce the assembly process to a single degree- children’s pop-up books (Fig. 1) As a page is
of-freedom of motion. Serial microassembly turned, a flat, planar structure assembles itself
of these structures is simpler; moreover, self- into the third dimension due to the way the var-
assembly using hydrodynamic forces during ious paper elements are hinged together and
release is much more feasible than with earlier, constrained. For decades, artists have been
multiple degree-of-freedom hinged structures. perfecting clever designs for use in pop-up
A 250-mm corner cube reflector, a 6-sided books.
closed box, and a 3-D model of the Berkeley
Campanile clock tower have been demon-
This concept has bee