文档介绍：2010 年第 9 期农业装备与车辆工程 2010
总第期
( 230 ) AGRICULTURAL EQUIPMENT & VEHICLE ENGINEERING (Totally 230)
【设计与研究】
doi: / -
MEMS 传感器技术在汽车上的应用研究与展望
黄军辉,杨旭志,陈述官,廖中文
广东农工商职业技术学院电子与信息工程系广东广州
( , 510507)
摘要:为了满足汽车电子化、智能化的需要,越来越多的 MEMS(微机电系统)传感器应用到汽车上。本文对主
要的几种汽车 MEMS 传感器的应用状况和研究现状进行简述, 并且对压力传感器和微加速度计的设计缺陷
进行研究。同时,结合 MEMS 传感器的特点和车载传感器的要求,对汽车 MEMS 传感器的发展提出几点建议
和展望。
关键词: 微机电系统;MEMS 传感器;汽车;综述
中图分类号: 文献标识码:A 文章编号:1673-3142(2010)09-0003-04
The Research and Prospect on Applications of MEMS Sensor Technology in Automotive
HUANG Jun-hui, YANG Xu-zhi, CHEN Shu-guan, LIAO Zhong-wen
(Department of Electronics and Information Engineering,Guangdong AIB Polytechnic College, Guangzhou 510507,China)
Abstract: In order to meet the needs of automotive electronics and intelligence, an increasing number of MEMS (Micro Electro
Mechanical System) sensors are applied to the car. In this paper, the present application and the current research of several major
automotive MEMS sensors are introduced, and the design flow of micro pressure sensor and accelerometer are studied. Meanwhile,
combine the characteristics of MEMS sensors and the requirements of vehicle sensors, a few suggestions and prospects on the
development of the automotive MEMS sensors are offered.
Keywords: micro electro mechanical system; MEMS sensor; automotive; summarize