化学溶液分解法制备LaNiO3薄膜的研究.pdf

文档介绍：第 22 卷第 4 期红外与毫米波学报 VoI. 22,No. 4
年月,
2003 8 J. Infrared MiIIim. Waves August 2003
化学溶液分解法制备薄膜的研究
LaNiO3
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李亚巍1 2 孟祥建1 于剑1 王根水1 孙璟兰1 褚君浩1 张伟风2
)
( 1 中国科学院上海技术物理所红外物理国家实验室,上海,200083;
)
2 河南大学物理系,河南,开封,475001)
摘要采用化学溶液分解法直接在单晶( )衬底上制备了薄膜,研究了不同热处理气氛(空气和氧气)
Si 100 LaNiO3
对薄膜的结晶性、晶粒尺寸、电阻率以及其上面生长的锆钛酸铅( PZT)薄膜的影响. 结果发现二种气氛得到的
薄膜的电阻率相差较大,其中在氧气中制备的薄膜电阻率仅为在空气中得到的对薄膜的导电
LaNiO3 1 / 2. LaNiO3
机制进行了讨论.
关键词退火气氛, 薄膜, ,电阻率
LaNiO3 CSD .
STUDY ON THE PREPARATION OF LaNiO3 THIN FILMS
USING CHEMICAL SOLUTION POSITION METHOD
,) ) ) ) )
LI Ya-Wei1 2 MENG Xiang-Jian1 YU Jian1 WANG Gen-Shui1 SUN Jing-Lan1
) )
CHU Jun-Hao1 ZHANG Wen-feng2
)
( 1 NationaI Laboratory for Infrared Physics,Shanghai Institute of TechnicaI Physics,Shanghai 200083,China;
)
2 Department of Physics,Henan University,Kai feng,Henan 475001,China)
( ) ( )
Abstract LaNiO3 thin fiIms on Si 100 substrates were prepared using chemicaI soIution position method CSD .
( ) , ,
The effects of anneaIing atmosphere air and oxygen on the crystaIIinity grain size and resistivity of LaNiO3 thin fiIms
and the PZT fiIms grown on the LNO Iayers were studied. The resuIts showed that the vaIue of the resistivity of the LaNiO3
thin fiIms anneaIed in oxygen is onIy haIf of that obtained in air. The conductive mechanism of LaNiO3 thin fiIms was dis-
cussed.
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Key wo