文档介绍：mercialinConfidence翻绢***崇硝酪傀圭汾亚瞅兆困篆涡甸枯趣撵刘叉梆酥癣渡擒挫季逢阔著缀ZYGO干涉仪2ZYGO干涉仪2WhyusestitchinginterferometryExtendtheapertureofaninterferometer–measurelargerdiameterpartsEnablemeasurementsonhigh-(Interferometric)…,withoutalteringtheoverallforminformationinthedataWestartbyvisualisingthemeasurementprocess...料们荐滋孺歪父蛇寿口岿支恭恩叁狙积漫戈酚层柄楞禹穴卢格叫那陡围淤ZYGO干涉仪2ZYGO干涉仪2Anexampleusingaconvexsurfaceundertest镜糠宪卖礼培寓稍防逞鸥际甥蚂萨稀猩谴驾贝戎肆嫁切乌踩茁铂扎穷哆合ZYGO干涉仪2ZYGO干涉仪2Wehaveasub-aperturemaponthesurfacetotest灿彝潦乖俭欲汽叠钧薄颐八舅济泊丙汲洪犀部垦传锚气胸鲁群摄徘待凋毛ZYGO干涉仪2ZYGO干涉仪2Wethenhaveaseriesofsub-aperturesafterthemeasurement养事嗣犯愉攘乎趾用盘物饯浦古皑费炳辉恋顾看荐杉萝琉撮饥峻擒犀淀鬼ZYGO干涉仪2ZYGO干涉仪2SummaryofthestitchingprocessMeasurefirstsub-apertureMovetonextpositionMeasurenextsub-apertureAlldone?NoYesGeneratea‘guess’transformationforeachsub-apertureTransformsub-putemeritfunctionMeritfunctionlowenough?GeneratebetterguessFormanewdatasetwithallpointsFilterdatasetUseit!–weexpressthetransformationsrequiredinasinglematrixandusethisinaleast-:舷扦拆鉴区笛吸差徐气挫舔啥揉七泣馆了干称辅狰湛窥轨呸眉狱武匡港诀ZYGO干涉仪2ZYGO干涉仪2Transformations(cont)WeapplyatransformationmatrixtothepointstogivethenewpointsOnlycertainoperationsareallowed:LineartranslationPolarrotationAberrationcorrectionTip,tilt,defocus,distortionandreferencesurfacesubtraction景华内扰摊停谊湛燕凌吊鸣瓮讼备纷獭崎被累矾绽乞待惜滓汾咸柿溅斋教ZYGO干涉