文档介绍：西安文理学院机械电子工程系
本科毕业设计(论文)
题目基于气浮支承引线键合定位平台设计
专业班级 08级机械(2)班
学号
学生姓名
指导教师
设计所在单位西安文理学院
2012年5月
基于气浮支承引线键合定位平台设计
摘要:
为满足新一代芯片封装设备对定位平台性能的要求,本文旨在研究设计一种全新的高推重比直接驱动气浮定位平台及其相应的位置伺服控制系统。通过协调机电系统的多影响参数,使平台在高加速度运动后,快速达到稳定状态。实现概念设计、详细设计、仿真实验以及系统的综合性能评估,提供面向芯片封装的高加速度高精度定位平台的单元级和原型级设计方法及关键技术的解决方案。
为了减小定位系统的摩擦力及其扰动,设计了一种基于气浮导轨支撑的两自由度高速精密定位平台。
该平台采用了新型的气浮解耦机构,使音圈电机置于固定支座上,有效地减小了定位平台的运动惯量。探讨了节流孔直径和导轨间隙对平台承载能力和静刚度的影响规律,得到一组优化参数;在此基础上对平台的运动稳定性进行深入分析,该平台在给定的初始条件下可快速趋于稳定,为该类气浮定位平台的设计提供了一定的理论基础。
关键词: 气浮支承芯片封装引线键合定位平台
全套图纸,加153893706
The positioning stage with air bearings, which based on the air-supported bearing and wire bonding
ABSTRACT:
In order to meet the requirements of the new generation of packaging equipments, this thesis is mainly to study and design pletely new positioning stage and its servo-control system.
The stage is directly driven by high thrust-weight ratio linear motor and supported by aerostatic bearings. Through adjusting the multi-factors of the electromechanical system, the stage can be stabilized in short time after high-acceleration moving. The work of this thesis is to realize conceptual and in-depth design, simulation, experiment prehensive performance assessment, providing unit and prototype design methods and solutions of key technology for high-acceleration/high-precision positioning stage for packaging equipment.
In order to reduce the friction of positioning table and make it unvaried, a positioning table with air bearings has been introduced. An air decoupling mechanism is designed to make the voice coil actuators placed on the base and effectively reduce the motion inertia. The detailed principle is present. The rules how carrying capacity and stiffness of the table change with the orifice dimension, bearing clearance and length-dimension ratio is discussed. At the same time the optimized dimensions of air bearing are given. On the basis of them, the kinematic stability of the table is analyzed in detail, and the table could be stab