文档介绍：Cheol Seong Hwang
Cha Young Yoo Editors
Atomic Layer
Deposition for
Semiconductors
Atomic Layer Deposition for Semiconductors
Cheol Seong Hwang • Cha Young Yoo
Editors
Atomic Layer Deposition
for Semiconductors
123
Editors
Cheol Seong Hwang Cha Young Yoo
Department of Materials Science Semiconductor R&D Center
and Engineering and Inter-university Samsung Electronics Co. Ltd
Semiconductor Research Center Yongin
Seoul National University Korea
Seoul
Korea
ISBN 978-1-4614-8053-2 ISBN 978-1-4614-8054-9 (eBook)
DOI -1-4614-8054-9
Springer New York Heidelberg Dordrecht London
Library of Congress Control Number: 2013951501
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