文档介绍：Brooks Automation
CTI-Cryogenics
pressor
Installation, Operation, and
Service Instructions
Brooks Automation 8040353
Revision 108
pressor
Installation, Operation, and Service Instructions
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or uracies.
AcuLigner, AcuLine, AcuTran, AcuTrav, AeroLoader IV, AeroTrak, ARV 2000, AquaTran, Atmospheric Express,
BALI 400 Indexer, BiSymmetrik, ExpressLock, FabExpress, FixLoad, FrogLeg, Gemini, Gemini Express, Gem-
ini Express Tandem, Guardian Bare Reticle Stocker, Hercules, Hercules Express, InCooler, InLigner, InLine
Express, Leapfrog, Linear eXchange, MagnaTran 7, MagnaTran 70, MagnaTran 8, MagnaTran X, Marathon,
Marathon Express, Marathon Express Tandem, MicroTool, MultiTran, OneFab AMHS, OpenMTS, PASIV, PF-
100, PowerPak, Reliance ATR, Reliance DFR, Reliance WCR, SENTRY, TCM, Time Optimal Trajectory, Top-
Cooler, TurboStocker, TurboStocker XT, Ultrasort, VacuTran, VCD, VCE, VPE, WAVE, WAVE II, Zaris, Z-Bot,
Aquatrap, Conductron, Convectron, Cool Solutions, Cryodyne, Cryogem, Cryogenerator, CryoTiger, Cryo-Torr,
CTI-Cryogenics, FastRegen™, GOLDLink, Granville-Phillips, GUTS, Helix, Micro-Ion, Mini-Convectron,
Mini-Ion™, On-Board, Polycold, RetroEase, RetroFast, Stabil-Ion, ThinLine™, TrueBlueSM, TurboPlus, and Vac-
uum AssuranceSM are trademarks of Brooks Automation Hardware.
All other trademarks are properties of their respective owners.
© Brooks Automation 2005, All Rights Reserved. The information included in this manual is Brooks Proprietary
Information and is provided for the use of Brooks customers only and cannot be used for distribution, reproduc-
tion, or sale without the expressed written permission of Brooks Automation. This information may be incorpo-
rated into the user’s documentation, however any changes made by the user to this information is