文档介绍：An Introduction to
Microelectromechanical
Systems Engineering
Second Edition
For a listing of recent titles in the Artech House Microelectromechanical
Systems (MEMS) Series, turn to the back of this book.
An Introduction to
Microelectromechanical
Systems Engineering
Second Edition
Nadim Maluf
Kirt Williams
Artech House, Inc.
Boston • London
Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the . Library of Congress.
British Library Cataloguing in Publication Data
Maluf, Nadim.
An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House
microelectromechanical library)
1. Microelectromechanical systems
I. Title II. Williams, Kirt
’81
ISBN 1-58053-590-9
Cover design by Igor Valdman
© 2004 ARTECH HOUSE, INC.
685 Canton Street
Norwood, MA 02062
All rights reserved. Printed and bound in the United States of America. No part of this book
may be reproduced or utilized in any form or by any means, electronic or mechanical, includ-
ing photocopying, recording, or by any information storage and retrieval system, without
permission in writing from the publisher.
All terms mentioned in this book that are known to be trademarks or service marks have
been appropriately capitalized. Artech House cannot attest to the accuracy of this informa-
tion. Use of a term in this book should not be regarded as affecting the validity of any trade-
mark or service mark.
International Standard Book Number: 1-58053-590-9
**********
To our families
Tanya, Ella, and Jad
Erika, Gordon, Brynn, and Reed
.
Contents
Foreword xiii
Preface xv
Preface to First Edition xix
CHAPTER 1
MEMS: A Technology from Lilliput 1
The Promise of Technology 1
What Are MEMS—or MST? 2
What Is Micromachining? 3
Applications and Markets 4
To MEMS or Not To MEMS? 7
Standards 8
The Psychological Barrier 8
Journals, Conferences, and Web Sites 9
List of Journal