文档介绍：EE 539A
Integrated Optics and
Optical MEMS
7 ― Optical MEMS: Applications in
Optical munications,
Part II
Optical Crossconnect
(Optical Switch)
Lih Y. Lin
EE 539A 7b-2
Purpose: work Provisioning
In the current work, provisioning of or 10 Gb/s
connections is a paper-mediated process that takes weeks
This process should be automated in response to service-layer request
and achieve seconds to minutes provisioning time.
IP router
IP router
Lih Y. Lin
EE 539A 7b-3
Purpose: work Restoration
Current work:
Basic restoration equipment: Digital electronic crossconnects or ADMs
Basic units of restoration: 45 Mb/s or 155 Mb/s
There is an emerging need to move to larger units of restoration, at or
approaching the wavelength level
X IP router
IP router
Lih Y. Lin
EE 539A 7b-4
Optical Crossconnects
for Provisioning and Restoration
work work
Wavelength Wavelength
-interchange -selective
...
Standard ...
...
crossconnect ... crossconnect
interfaces
...
...
...
...
OXC
...
...
...
...
ATM IP ATM IP
Require high-port-count optical switches Require medium-port-count optical switches
Lih Y. Lin
EE 539A 7b-5
2-D MEMS Digital Crossbar Switches
Virtues: Simple binary mirror-control. Precise angular
alignment can be achieved easily.
Challenges: Scalability. 32 x 32 is probably a reasonable
limit for single stage → Good for wavelength-
selective crossconnects.
Lih Y. Lin
EE 539A 7b-6
Example of Micro-actuated Switch Mirror
Compact translation-to-free-
rotation conversion
22 µm translation → 90° rotation
Switch
mirror
Pushrod
Hinge
joint Hinge
Actuated
translation stage
Lih Y. Lin
EE 539A 7b-7
Scratch-drive Actuation
Fabrication Working principle
Poly-2
PSG-2
PSG-1
Si3N4
Si
∆X ~ 10’s of nm
Si
Lih Y. Lin
Akiyama et al., IEEE J. of Microelectromechanical Systems, 1993. EE 539A 7b-8
2-D MEMS Optical Switching Video
Uni-directi