文档介绍：Mechanics of
Microelectro-
mechanical
Systems
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Nicolae Lobontiu
Ephrahim Garcia
Mechanics of
Microelectromechanical
Systems
KLUWER ACADEMIC PUBLISHERS
NEW YORK, BOSTON, DORDRECHT, LONDON, MOSCOW
eBook ISBN: 0-387-23037-8
Print ISBN: 1-4020-8013-1
©2005 Springer Science + Business Media, Inc.
Print ©2005 Kluwer Academic Publishers
Boston
All rights reserved
No part of this eBook may be reproduced or transmitted in any form or by any means, electronic,
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To our families
TABLE OF CONTENTS
Preface ix
1 STIFFNESS BASICS 1
1 INTRODUCTION 1
2 STIFFNESS DEFINITION 1
3 DEFORMATIONS, STRAINS AND STRESSES 6
4 MEMBERS, LOADS AND BOUNDARY CONDITIONS 14
5 LOAD-DISPLACEMENT CALCULATION METHODS:
CASTIGLIANO’S THEOREMS 21
POSITE MEMBERS 43
7 PLATES AND SHELLS 58
Problems 60
2 MICROCANTILEVERS, MICROHINGES,
MICROBRIDGES 65
1 INTRODUCTION 65
2 MICROCANTILEVERS 66
3 MICROHINGES 97
POUND MICROCANTILEVERS 103
5 MICROBRIDGES 114
Problems 126
3 MICROSUSPENSIONS 131
1 INTRODUCTION 131
2 MICROSUSPENSIONS FOR LINEAR MOTION 131
3 MICROSUSPENSIONS FOR ROTARY MOTION 170
Problems 179
4 MICROTRANSDUCTION: ACTUATION AND SENSING 183
1 INTRODUCTION 183
2 THERMAL TRANSDUCTION 184
3 ELECTROSTATIC TRANSDUCTION 195
4 IC/IC TRANSDUCTION 212
5 PIEZOELECTRIC (PZT) TRANSDUCTION 223
6 IC TRANSDUCTION 230
7 SHAPE MEMORY ALLOY (SMA) TRANSDUCTION 232
8 BIMORPH TRANSDUCTION 238
9 MULTIMORPH TRANSDUCTION 249
10 OTHER FORMS OF TRANSDUCTION 256
Problems 257
viii
5 STATIC RESPONSE OF MEMS 263
1 INTRODUCTION 263
2 SINGLE-SPRING MEMS 263
3 TWO-SPRING MEMS 271
4 MULTI-SPRING MEMS 285
5 DISPLACEMENT-AMPLIFICATION MICRODEVICES 286
6 LARGE DEFORMATIONS 307
7 BUCKLING 315
POUND STR