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6 Edition
Low Level Measurements Handbook
Precision DC Current, Voltage, and Resistance Measurements
Low Level Measurements Handbook Level Low
Specifications are subject to change without notice.
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A GREATER MEASURE OF CONFIDENCE
6
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Keithley Instruments, Inc. Edition
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) •
© Copyright 2004 Keithley Instruments, Inc. No. 1559
Printed in . 80440KSI
A GREATER MEASURE OF CONFIDENCE
aForewordNew 8/6/04 4:25 PM Page i
Low Level
Measurements
Handbook
Precision DC Current, Voltage,
and Resistance Measurements
SIXTH EDITION
A GREATER MEASURE OF CONFIDENCE
aForewordNew 8/6/04 4:25 PM Page ii
aForewordNew 8/6/04 4:25 PM Page iii
TABLE OF C ONTENTS
SECTION 1 Low Level DC Measuring Instruments
Introduction ..................................................................................1-3
Theoretical Measurement Limits..............................................1-3
Instrument Definitions................................................................1-5
The Electrometer..........................................................1-5
The DMM......................................................................1-7
The Nanovoltmeter ......................................................1-7
The Picoammeter..........................................................1-8
The Source-Measure Unit ............................................1-8
The SourceMeter® Instrument ....................................1-9
The Low Current Preamp ............................................1-9
The Micro-ohmmeter....................................................1-9
Understanding Instrumen