文档介绍：
基于空间调制电场诱导去润湿的曲率可控
微透镜阵列制造#
李祥明,邵金友,丁玉成,田洪淼,杨清振**
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(西安交通大学,机械制造系统工程国家重点实验室)
摘要:微透镜阵列(MLA)是重要的微光学元件,本研究提出一种高效率低成本的曲率可控的
微透镜阵列制造方法。在透明导电衬底上旋涂一定厚度的紫外光固化树脂,在树脂薄膜上方
一定高度处悬置一具有微孔阵列的导电的重掺杂硅模板,在衬底和模板之间施加一定电压
时,平坦的树脂薄膜会发生去润湿现象,即形成与模板微孔阵列相对应的周期性弯曲的气-
液界面,当施加的电压达到或超过一定值时,流变后的树脂薄膜会接触到模板微孔的凸出部
分。然后对紫外光固化树脂进行紫外曝光固化,并将模板与之分离,即可得到凹型微透镜阵
列结构。微透镜的树脂孔径取决于其凹陷深度,凹陷深度可由模板与树脂薄膜的初始间距精
确控制。在本研究中,开口直径为 30 um 的微透镜的凹陷深度可达到 15 um,对应的树脂孔
径可达到 。此外,利用凹透镜作为模板,实现了凸型微透镜结构的制造。
关键词:微透镜阵列;电诱导去润湿;电动流体力学
中图分类号:TB32
Fabrication of Microlens Arrays with Controlable
Curvature Based on Electrically Induced Dewetting by
Spatially Modulcated Electricfiled
LI Xiangming, SHAO Jinyou, DING Yucheng, TIAN Hongmiao, YANG Qingzhen
(State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University)
Abstract: Microlens arrays (MLAs) are familiar and important micro-optical elements. An
economic and straightforwardstretagy for fabricating MLAs with controlable curvature is
proposed in this study. In our strategy, a voltage is applied between a pair of electrodes, . a
conductor substrate coated with a UV-curable prepolymer film and a hole-arrayed Si-mold over
the film with an air gap, to dewet the prepolymer film to leave a curved air-liquid interface. At or
beyond a critical voltage, the curved prepolymer can quicklytouch the upper Si-mold. By curi