文档介绍：华中科技大学
硕士学位论文
高速硅基Mach-Zehnder调制器设计与模拟
姓名:毛岸
申请学位级别:硕士
专业:光学工程
指导教师:周治平
20080531
华中科技大学硕士学位论文
摘要
硅材料作为微电子领域的传统材料,在加工工艺和制作成本上有着其他材料无
可比拟的优势。现在许多传统的基于Ⅲ-Ⅴ族材料的电光调制器利用直接电光效应
实现了 40GHz 高速电光调制,但是器件制作成本高,而且与微电子工艺不兼容,而硅
基材料是能够做到低成本光电集成的首选材料。本文在湖北省重大自然科学研究基
金的资助下,对硅基调制器的理论模型和性能参数做了系统性的分析研究,设计了
硅基热光以及电光调制器结构,并对其进行模拟,完成的主要工作有以下几点:
(1)基于硅材料的高热光系数,以及在 1550 波段的透明性,设计了硅基的热
光调制器,通过 Ansys 软件对其导热温度分布,及导热响应速度进行了模拟,并优
化了器件的结构参数;
(2)根据等离子色散的原理,利用 Atlas 软件设计了双金属氧化半导体电容型
的硅基电光调制器,并对其结构进行优化设计,主要通过研究调制器的调制速度,
调制臂的长度,所加的电压之间的关系,调整器件的结构参数;
(3)同样是基于等离子色散的原理,利用 Atlas 软件设计了 N-P-N 结构的硅基
电光调制器,在不同的反向偏压下,pn 的耗尽层宽度会有所变化,从而使得硅材料
的折射率发生变化,由此对光进行调制,通过改变结构参数,进行了一系列的模拟,
并得到一个相对优化的结果。
关键词:硅基调制器等离子色散效应调制速度马赫-泽德干涉仪
I
华中科技大学硕士学位论文
Abstract
Silicon is an extraordinary material in microelectronics due to patibility with
standard CMOS platform and low cost. Nowadays, many Ⅲ-Ⅴ based electro-optic
modulator can reach modulation speed as high as 40GHz. However, they are not so
favorable for their high cost and non- compatibility with CMOS platform. Moreover,
Silicon is the first choice for low cost optoelectronic integrated circuit (OEIC). Supported
by the Natural Science Foundation of Hubei Province, the theoretical model and several
typical kinds of silicon based MZI modulator are introduced and studied in this thesis. The
main contents are listed as follows:
(1)Based on the high thermal-optical constant and the transparency of silicon at
, a silicon based thermal-optic MZI modulator is designed. The thermal
distribution and thermal conduct are simulated by using the software Ansys. The
parameters are optimized.
(2)Based on the carrier plasma dispersion effect, a forward biased pn junction
structure is designed. Photonic crystal waveguide is introduced into this structure. The
structure is designed by using the software Atlas, and the optimization has been done to
the structure.
(3)Based on the carrier plasma dispersion ef