文档介绍：
半导体读出电路与超导体太赫兹检测器的
集成化
许钦印,日比康词,陈健,康琳,吴培亨
(南京大学电子科学与工程学院,南京 210093)
摘要:在制作基于二维超导检测阵列的太赫兹成像系统时,为了降低系统噪声,提高灵敏度、
运行速度和工作稳定性,设计了一种集成低噪声低温半导体读出电路的高灵敏度超导太赫兹
检测系统。基于 Nb/Al/AlOX/Al/Nb 超导隧道结制备了超导太赫兹直接检测器,使用半导体
砷化镓结型场效应晶体管制备低温读出电路,并将超导体元器件和半导体元器件集成在同一
块芯片上,避免了传统工艺中常用的连接导线或者焊盘。将集成芯片设计成直径为 12 mm
的圆形芯片,与耦合太赫兹波信号的硅超半球透镜的尺寸一致,并将检测器天线制备在集成
芯片中心处,解决了太赫兹波的耦合等问题。
关键词:超导电子;半导体读出电路;超导体太赫兹检测器
中图分类号:TN4
文献标识码:A
Integration of semiconductor readout circuits and
superconductor THz detectors
Xu Qinyin, Hibi Yasunori, Chen Jian, Kang Lin, Wu Peiheng
(School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China)
Abstract: In order to reduce system noise and improve system sensitivity, stability and speed of large
format 2-dimensional (2D) arrays for terahertz (THz) detectors, high sensitivity superconductor THz
detectors integrated with low noise cryogenic semiconductor readout circuits were designed. The
superconductor THz direct detectors were fabricated by Nb/Al/AlOX/Al/Nb tunnel junctions and the
readout circuits were fabricated by n-type GaAs JFETs. Thereby, the superconductor and
semiconductor devices were integrated in the same chip so that thin film wires can replace the cables or
bonding wires in the traditional process. To get better coupling, this integrated chip was deigned to be a
circular shape with a diameter of 12 mm, so that the ante