文档介绍：
JournalofSemiconduclors
Seplentber200
Epitaxialgrowthon4HSiCbyTCSasasiliconprecursor
五GangteRD,SunGuosheng8#国胞,UiuXingfangX8,WangLei王借,ZhaoWanshunt&万吴
ZengYiping腐一早,andLiJinnin孙相闻
iaLabuaonofsenicolecerMaeriahSrineeIoniuicofSoniconlucorsChnechealomyfSirees5ejoeJpopsChony
AbstrictEpiaxialgowionrype4tHSICoforcnedaibsnieswitiaspeof10x10mntstdifeenten
PeatreswitvarioustslowmieslasbeenperfonnedinahorzonalhowallCVDeacorsingidionsione
ICSJasaSiiconpectrorsoureiotelerwithehylenessacatonpmcuroriouteThcgrowhnemeached23
goodsurticemomhalogyialowRMSof06tnminanamesof10x0Thehonosptaiallsyervwesob
cnedat1500Cwitlowgowlhnate5ynjndile3CSCoplyesveeobainedat16i0Cvitiagowdh
enperioreandgmwineSiicondmpleswi0dffesntizesereobenedontiearccofichomocpiasid
IeyerinalewCSintioof032
Keyverds48SICiTCSieplxialgowlgovne
PACCy6gp0i68sst8lnsH
DOI0408VI67449266090ao05
1LIntroduction
Aainenenonsomiconducormateialsiicon
cabicSiCOisapomisngmaetalintealdiofhighten
periureighpowerandighfequencydevicesdueee
wdcbndapthcicalbeakdowfdldamdhigtermal
SCaeveryatncivelorieecononiatonofeegyinte
domsinofsicmicposerCurendbclondebsedhomoept
xialgowiof4iLSCinsatmcedmuchinerssinece
addtonofilonnaeispesiesesnivturecompleety
chngedemaciigindea