文档介绍：14
Rotational
and Translational
Microelectromechanical
Systems: MEMS
Synthesis,
Microfabrication,
Analysis,
and Optimization
Introduction
MEMS Motion Microdevice Classifier
and Structural Synthesis
MEMS Fabrication
Bulk Micromachining • Surface Micromachining
• LIGA and LIGA-Like Technologies
MEMS ic Fundamentals
and Modeling
MEMS Mathematical Models
Example : Mathematical Model of the Translational
Microtransducer • Example : Mathematical Model
of an Elementary Synchronous Reluctance Micromotor
• Example : Mathematical Model of Two-Phase
Permanent- Stepper Micromotors • Example :
Mathematical Model of Two-Phase Permanent-
Synchronous Micromotors
Control of MEMS
Proportional-Integral-Derivative Control • Tracking
Control • Time-Optimal Control • Sliding Mode
Control • Constrained Control of Nonlinear MEMS:
Hamilton–Jacobi Method • Constrained Control of
Nonlinear Uncertain MEMS: Lyapunov Method
• Example : Control of Two-Phase
Sergey Edward Lyshevski Permanent- Stepper Micromotors
Purdue University Indianapolis Conclusions
©2002 CRC Press LLC
Introduction
ic-based MEMS are widely used in various sensing and actuation applications. For these
MEMS, rotational and translational motion microdevices are needed to be devised, designed, and con-
trolled. We introduce the classifier paradigm to perform the structural synthesis of MEMS upon electro-
ic features. As motion microdevices are devised, the following issues are emphasized: modeling,
analysis, simulation, control, optimization, and validation. Innovative results are researched and studied
applying the classifier, structural synthesis, design, analysis, and optimization concepts developed. The
need for innovative integrated methods to perform prehensive analysis, high-fidelity modeling,
and design of MEMS has facilitated theoretical developments within the overall spec