文档介绍：Advances in Silicon Carbide
Processing and Applications
Stephen E. Saddow
Anant Agarwal
Editors
Artech House, Inc.
Boston • London
Library of Congress Cataloguing-in-Publication Data
A catalog record for this book is available from the Library of Congress.
British Library Cataloguing in Publication Data
Advances in silicon carbide processing and applications.—(Artech House semiconductor
materials and devices library).
1. Silicon carbide 2. Silicon carbide—Industrial applications
I. Saddow, Stephen E. II. Agarwal, Anant
’8152
ISBN 1-58053-740-5
Cover design by Igor Valdman
© 2004 ARTECH HOUSE, INC.
685 Canton Street
Norwood, MA 02062
All rights reserved. Printed and bound in the United States of America. No part of this book
may be reproduced or utilized in any form or by any means, electronic or mechanical, includ-
ing photocopying, recording, or by any information storage and retrieval system, without
permission in writing from the publisher.
All terms mentioned in this book that are known to be trademarks or service marks have
been appropriately capitalized. Artech House cannot attest to the accuracy of this informa-
tion. Use of a term in this book should not be regarded as affecting the validity of any trade-
mark or service mark.
International Standard Book Number: 1-58053-740-5
**********
To our wives, Karen and Suman, for their love and patience
Contents
Preface xi
Acknowledgments xiii
CHAPTER 1
Silicon Carbide Overview 1
General Properties 1
Mechanical and Chemical Properties 2
Bandgap 2
Critical Field 2
Saturated Drift Velocity 3
Thermal Conductivity 3
Figures of Merit 4
History 4
Berzelius and Acheson 4
The Discovery of Polytypism 6
The First LED and the Lely Process 6
The Lost Decades 7
The Second Wave 7
The Third Wave 7
Crystalline Structure 8
Basic Structure 8
Polytypi